Research Article
Dynamic Characteristics of Electrostatically Actuated Shape Optimized Variable Geometry Microbeam
Table 1
Comparison of pull-in parameters of three available data sets.
| Case | Microbeam parameters | Pull-in parameters | Relative error (%) | | Travel range | Voltage (V) | | | | | | (GPa), | Present work | Reference | Present work | Reference | Pull-in travel range | Pull-in voltage | (m) |
| 1 | 250 | 50 | 3 | 1 | 169, 0.06 | 0.4028 | 0.40 (Joglekar and Pawaskar 2012) [13] | 39.59 | 39.50 (Osterberg and Senturia 1997) [4] | 0.70 | 0.23 | 2 | 350 | 50 | 3 | 1 | 169, 0.06 | 0.4028 | 0.40 (Joglekar and Pawaskar 2012) [13] | 20.20 | 20.20 (Osterberg and Senturia 1997) [4] | 0.70 | 0 | 3 | 510 | 100 | 1.5 | 1.18 | 166, 0.06 | 0.424 | 0.428 (Nayfeh et al. 2007) [19] | 4.82 | 4.8 (Nayfeh et al. 2007) [19] | −0.93 | 0.42 |
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