Research Article
Dynamic Characteristics of Electrostatically Actuated Shape Optimized Variable Geometry Microbeam
Table 2
Comparison of pull-in parameters of the optimized microbeam (reference prismatic microbeam’s pull-in travel range: 0.4028/0.405, pull-in voltage: 8.426/8.383).
| Case | Pull-in travel range | Relative error (%) | Pull-in voltage | Relative error (%) | Present work/reference | Present work/reference |
| S1 | 0.436/0.425 | 2.59 | 9.465/9.693 | −2.35 | S2 | 0.474/0.454 | 4.41 | 11.271/12.535 | −10.08 | S3 | 0.482/0.469 | 2.77 | 13.273/15.222 | −12.80 | S4 | 0.429/0.424 | 1.18 | 9.477/9.685 | −2.14 | S5 | 0.470/0.456 | 3.07 | 11.680/12.638 | −7.58 | S6 | 0.464/0.460 | 0.87 | 13.144/14.393 | −8.68 | S7 | 0.431/0.424 | 1.65 | 9.477/9.672 | −2.01 | S8 | 0.447/0.441 | 1.36 | 11.588/12.254 | −5.43 | S9 | 0.443/0.441 | 0.45 | 11.496/12.276 | −6.35 |
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