Dynamic Characteristics of Electrostatically Actuated Shape Optimized Variable Geometry Microbeam

Table 2

Comparison of pull-in parameters of the optimized microbeam (reference prismatic microbeam’s pull-in travel range: 0.4028/0.405, pull-in voltage: 8.426/8.383).

Case	Pull-in travel range	Relative error (%)	Pull-in voltage	Relative error (%)
	Present work/reference		Present work/reference
S1	0.436/0.425	2.59	9.465/9.693	−2.35
S2	0.474/0.454	4.41	11.271/12.535	−10.08
S3	0.482/0.469	2.77	13.273/15.222	−12.80
S4	0.429/0.424	1.18	9.477/9.685	−2.14
S5	0.470/0.456	3.07	11.680/12.638	−7.58
S6	0.464/0.460	0.87	13.144/14.393	−8.68
S7	0.431/0.424	1.65	9.477/9.672	−2.01
S8	0.447/0.441	1.36	11.588/12.254	−5.43
S9	0.443/0.441	0.45	11.496/12.276	−6.35