Research Article
Dynamic Characteristics of Electrostatically Actuated Shape Optimized Variable Geometry Microbeam
Table 3
Optimized parameters of dynamic mode of actuation of fixed-fixed microbeam [
13].
| Case | | | | |
| D1 | 1.333 | 0.003 | 0.452 | 0.394 | D2 | 2.000 | 0.001 | 1.317 | 0.393 | D3 | 2.667 | 0.001 | 1.993 | 0.434 | D4 | 1.333 | 0.001 | 0.763 | 0.233 | D5 | 2.000 | 0.001 | 1.813 | 0.292 | D6 | 2.146 | 0.001 | 2.024 | 0.302 | D7 | 1.333 | 0.014 | 0.656 | 0.282 | D8 | 1.872 | 0.001 | 2.156 | 0.223 | D9 | 1.872 | 0.001 | 2.156 | 0.223 |
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