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Shock and Vibration
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Shock and Vibration
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2015
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Article
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Tab 4
/
Research Article
Dynamic Characteristics of Electrostatically Actuated Shape Optimized Variable Geometry Microbeam
Table 4
Dimension and physical parameters of a typical fixed-fixed microbeam.
80
μ
m
20
μ
m
1
μ
m
0.5
μ
m
169 GPa
0.06
40
μ
m
8
μ
m