Fusion Algorithm-Based Temperature Compensation Method for High-G MEMS Accelerometer

<table class="table-group" id="tab1"><tr><td><table class="table"><tr><td class="thead-hr" colspan="7"><hr/></td></tr><tr class="thead"><td class="align_left"> </td><td class="align_center" colspan="3">Mass</td><td class="align_center" colspan="3">Beam</td></tr><tr><td class="thead-hr" colspan="7"><hr/></td></tr><tr><td class="align_left">Parameters</td><td class="align_center">Length (<i>a</i><sub>1</sub>)</td><td class="align_center">Width (<i>b</i><sub>1</sub>)</td><td class="align_center">Height (<i>c</i><sub>1</sub>)</td><td class="align_center">Length (<i>a</i><sub>2</sub>)</td><td class="align_center">Width (<i>b</i><sub>2</sub>)</td><td class="align_center">Height (<i>c</i><sub>1</sub>)</td></tr><tr><td class="align_left">Size (<i>μ</i>m)</td><td class="align_center">800</td><td class="align_center">800</td><td class="align_center">200</td><td class="align_center">350</td><td class="align_center">800</td><td class="align_center">80</td></tr><tr class="table-tr"><td colspan="7"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

<div>Structural parameters of the High-G MEMS accelerometer.</div>

Shock and Vibration

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Table 1

Table 1: Fusion Algorithm-Based Temperature Compensation Method for High-G MEMS Accelerometer 