Formation of Three-Way Scanning Electron Microscope Moiré on Micro/Nanostructures

<table>Formation principle of three-way SEM moiré for a pillar-type specimen grating. In (b), the white part denotes the exposed EB and the black part represents the unexposed EB.</table>

The Scientific World Journal

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Figure 3

Figure 3: Formation of Three-Way Scanning Electron Microscope Moiré on Micro/Nanostructures 