| Parameters | Value |
| Angles , , and | 60°, 30°, and 65° | Angles , , and | 60°, 30°, and 65° | Minimum gap, | 5 m | Horizontal displacement, | 100 m | Fixed electrode width, | 5 m | Moving electrode width, | 5 m | Number of small fixed fingers, | 20 | Number of small moving fingers, | 20 | Length of moving electrode, | 205 m | Length of fixed electrode, | 205 m | Length of , , , , , , , and | 5 m | Length of and | 8 m |
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