Modeling of a High Force Density Fishbone Shaped Electrostatic Comb Drive Microactuator

Table 1

Parameters of basic fishbone shaped comb drive.

Parameters	Value
Angles 𝜶1, 𝜶2, and 𝜶3	60°, 30°, and 65°
Angles 𝜷1, 𝜷2, and 𝜷3	60°, 30°, and 65°
Minimum gap, 𝑔min	5 𝜇m
Horizontal displacement, 𝐷	100 𝜇m
Fixed electrode width, 𝑤𝑓	5 𝜇m
Moving electrode width, 𝑤𝑚	5 𝜇m
Number of small fixed fingers, 𝑚1	20
Number of small moving fingers, 𝑚2	20
Length of moving electrode, 𝐿𝑚	205 𝜇m
Length of fixed electrode, 𝐿𝑓	205 𝜇m
Length of 𝑎, 𝑏, 𝑐, 𝑑, 𝑝, 𝑞, 𝑟, and 𝑠	5 𝜇m
Length of 𝑒 and 𝑡	8 𝜇m