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VLSI Design
Volume 8 (1998), Issue 1-4, Pages 117-121
http://dx.doi.org/10.1155/1998/47283

X3D Moving Grid Methods for Semiconductor Applications

Los Alamos National Laboratory, USA

Copyright © 1998 Hindawi Publishing Corporation. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

The Los Alamos 3D grid toolbox handles grid maintenance chores and provides access to a sophisticated set of optimization algorithms for unstructured grids. The application of these tools to semiconductor problems is illustrated in three examples: grain growth, topographic deposition and electrostatics. These examples demonstrate adaptive smoothing, front tracking, and automatic, adaptive refinement/derefinement.