VLSI Design

Research Article

A Pull-in Based Test Mechanism for Device Diagnostic and Process Characterization

Table 2

Pull-in and resonance frequency measured values.
Parameter Value
Device 1Asymmetric right- 𝑉 p r 3.665 V
Asymmetric left- 𝑉 p l 3.935 V
Symmetric- 𝑉 𝑠 4.495 V
Resonance frequency- 𝑓 0 2700 Hz
Device 2Asymmetric right- 𝑉 p r 3.781 V
Asymmetric left- 𝑉 p l 3.955 V
Symmetric- 𝑉 𝑠 4.70 V
Resonance frequency- 𝑓 0 2730 Hz
Device 3Asymmetric right- 𝑉 p r 3.751 V
Asymmetric left- 𝑉 p l 3.911 V
Symmetric- 𝑉 𝑠 4.679 V
Resonance frequency- 𝑓 0 2720 Hz