Antonella Poggi

Institute for Microelectronics and Microsystems, Italy

Antonella Poggi received the degree in solid state physics from the University of Bologna, Bologna, Italy, in 1983. Since then, she has been with the Institute of Microelectronics and Microsystems (former LAMEL), Italian National Research Council, Bologna working on the study of the technological process for VLSI application. She has been actively involved in the advanced processes for silicon CMOS technology. Furthermore, she was engaged on silicon micromachining, particularly devoted to the realization of silicon optical bench and to the fabrication of devices for chemical sensor application. Her experience is in processing for device implementation, mainly MOSFET technology. After a long period devoted to the development of microelectronics and MEMS on silicon, in the last ten years her research interest has shifted on silicon carbide as a promising material for high temperature, high-power and high-frequency electronic and harsh environment sensors. Her current research covers MEMS technology for gas sensing applications. She is author of more than 70 articles published in national and international magazines.

Biography Updated on 1 June 2011

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