`Smart Materials ResearchVolume 2011 (2011), Article ID 452901, 6 pageshttp://dx.doi.org/10.1155/2011/452901`
Review Article

## Pb(Mg1/3Nb2/3)O3–PbTiO3 (PMN-PT) Material for Actuator Applications

1Electronic Ceramics Department, Jožef Stefan Institute, Jamova 39, 1000 Ljubljana, Slovenia
2HIPOT-RR, Šentpeter 18, 8222 Otočec, Slovenia

Received 1 December 2010; Accepted 24 January 2011

Copyright © 2011 Hana Uršič et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

1. S. E. Park and T. R. Shrout, “Ultrahigh strain and piezoelectric behavior in relaxor based ferroelectric single crystals,” Journal of Applied Physics, vol. 82, no. 4, pp. 1804–1811, 1997.
2. S. E. Park and T. R. Shrout, “Relaxor based ferroelectric single crystals for electro-mechanical actuators,” Materials Research Innovations, vol. 1, no. 1, pp. 20–25, 1997.
3. M. Allahverdi, A. Hall, R. Brennan, M. E. Ebrahimi, N. Marandian Hagh, and A. Safari, “An overview of rapidly prototyped piezoelectric actuators and grain-oriented ceramics,” Journal of Electroceramics, vol. 8, no. 2, pp. 129–137, 2002.
4. A. Hall, E. K. Akdogan, and A. Safari, “Fatigue properties of piezoelectric-electrostrictive Pb(Mg1/3, Nb2/3)O3–PbTiO3 monolithic bilayer composites,” Journal of Applied Physics, vol. 100, no. 9, Article ID 094105, 2006.
5. H. Takagi, K. Sakata, and T. Takenaka, “Electrostrictive properties of Pb(Mg1/3Nb2/3)O3-based relaxor ferroelectric ceramics,” Japanese Journal of Applied Physics Part 1, vol. 32, no. 9, pp. 4280–4283, 1993.
6. D. J. Arbogast and F. T. Calkins, “Electrical system for electrostrictive bimorph actuator,” US patent no. 6,888,291 B2.
7. H. Ikawa and M. Takemoto, “Products and microwave dielectric properties of ceramics with nominal compositions $\left({\text{Ba}}_{1-x}{\text{Ca}}_{x}\right)\left({B}_{1/2}{B}_{1/2}\text{'}\right){\text{O}}_{3}$  $\left(B={\text{Y}}^{3+},{\text{Nd}}^{3+},{\text{Gd}}^{3+};B\text{'}={\text{Nb}}^{5+},{\text{Ta}}^{5+}\right)$,” Materials Chemistry and Physics, vol. 79, no. 2-3, pp. 222–225, 2003.
8. C. Tanuma, “A parallel-bimorph-type piezoelectric actuator for high-resolution imager,” Japanese Journal of Applied Physics Part 1, vol. 38, no. 9, pp. 5603–5607, 1999.
9. G. Rodrigues, R. Bastaits, S. Roose et al., “Modular bimorph mirrors for adaptive optics,” Optical Engineering, vol. 48, no. 3, Article ID 034001, 2009.
10. E. H. Yang, K. Shcheglov, and S. Trolier-McKinstry, “Concept, modeling and fabrication techniques for large-stroke piezoelectric unimorph deformable mirrors,” in MOEMS and Miniaturized Systems III, Proceeding of SPIE, pp. 326–333, January 2003.
11. B. Noheda, D. E. Cox, G. Shirane, S. E. Park, L. E. Cross, and Z. Zhong, “Polarization rotation via a monoclinic phase in the piezoelectric 92% ${\text{PbZn}}_{1/3}{\text{Nb}}_{2/3}{O}_{3}$-8%PbTiO,” Physical Review Letters, vol. 86, no. 17, pp. 3891–3894, 2001.
12. M. Davis, D. Damjanovic, and N. Setter, “Electric-field-, temperature-, and stress-induced phase transitions in relaxor ferroelectric single crystals,” Physical Review B, vol. 73, no. 1, Article ID 014115, 16 pages, 2006.
13. J. Kelly, M. Leonard, C. Tantigate, and A. Safari, “Effect of composition on the electromechanical properties of (1-x)Pb$\left({\text{Mg}}_{1/3}{\text{Nb}}_{2/3}\right){\text{O}}_{3-\text{X}}$PbTiO3 ceramics,” Journal of the American Ceramic Society, vol. 80, no. 4, pp. 957–964, 1997.
14. Z. Xia, L. Wang, W. Yan, Q. Li, and Y. Zhang, “Comparative investigation of structure and dielectric properties of Pb(Mg1/3Nb2/3)O3–PbTiO3 (65/35) and 10% PbZrO3-doped Pb(Mg1/3Nb2/3)O3–PbTiO3 (65/35) ceramics prepared by a modified precursor method,” Materials Research Bulletin, vol. 42, no. 9, pp. 1715–1722, 2007.
15. T. R. Shrout, Z. P. Chang, N. Kim, and S. Markgraf, “Dielectric behavior of single crystals near the (1-X) Pb(Mg1/3Nb2/3)O3-(x) PbTiO3 morphotropic phase boundary,” Ferroelectrics Letters, vol. 12, no. 3, pp. 63–69, 1990.
16. R. Zhang, B. Jiang, and W. Cao, “Elastic, piezoelectric, and dielectric properties of multidomain 0.67Pb(Mg1/3Nb2/3)O3–0.33PbTiO3 single crystals,” Journal of Applied Physics, vol. 90, no. 7, pp. 3471–3475, 2001.
17. M. Algueró, J. Ricote, R. Jiménez et al., “Size effect in morphotropic phase boundary Pb (Mg1/3Nb2/3)O3–PbTiO3,” Applied Physics Letters, vol. 91, no. 11, Article ID 112905, 2007.
18. M. Algueró, A. Moure, L. Pardo, J. Holc, and M. Kosec, “Processing by mechanosynthesis and properties of piezoelectric Pb(Mg1/3Nb2/3)O3–PbTiO3 with different compositions,” Acta Materialia, vol. 54, no. 2, pp. 501–511, 2006.
19. E. R. Leite, A. M. Scotch, A. Khan et al., “Chemical heterogeneity in PMN-35PT ceramics and effects on dielectric and piezoelectric properties,” Journal of the American Ceramic Society, vol. 85, no. 12, pp. 3018–3024, 2002.
20. H. Uršic, J. Tellier, M. Hrovat et al., “The effect of poling on the properties of 0.65Pb(Mg1/3Nb2/3)O3–0.35PbTiO3 ceramics,” Japanese Journal of Applied Physics, vol. 50, no. 3, 2011. In press.
21. S. Gentil, D. Damjanovic, and N. Setter, “Pb$\left({\text{Mg}}_{1/3}{\text{Nb}}_{2/3}\right){\text{O}}_{3}$ and ($1-x$)Pb($\left({\text{Mg}}_{1/3}{\text{Nb}}_{2/3}\right){\text{O}}_{3-x}$PbTiO3 relaxor ferroelectric thick films: processing and electrical characterization,” Journal of Electroceramics, vol. 12, no. 3, pp. 151–161, 2004.
22. D. Kuščer, M. Skalar, J. Holc, and M. Kosec, “Processing and properties of 0.65Pb$\left({\text{Mg}}_{1/3}{\text{Nb}}_{2/3}\right){\text{O}}_{3}$–0.35PbTiO3 thick films,” Journal of the European Ceramic Society, vol. 29, no. 1, pp. 105–113, 2009.
23. L. E. Cross, “Relaxor ferroelectrics,” Ferroelectrics, vol. 76, no. 1, pp. 241–267, 1987.
24. S. L. Swartz, T. R. Shrout, W. A. Schulze, and L. E. Cross, “Dielectric properties of lead-magnesium niobate ceramics,” Journal of the American Ceramic Society, vol. 67, no. 5, pp. 311–315, 1984.
25. S. L. Swartz and T. R. Shrout, “Fabrication of perovskite lead magnesium niobate,” Materials Research Bulletin, vol. 17, no. 10, pp. 1245–1250, 1982.
26. K. Uchino, S. Nomura, L. E. Cross, S. J. Jang, and R. E. Newnham, “Electrostrictive effect in lead magnesium niobate single crystals,” Journal of Applied Physics, vol. 51, no. 2, pp. 1142–1145, 1980.
27. J. Zhao, Q. M. Zhang, N. Kim, and T. Shrout, “Electromechanical properties of relaxor ferroelectric lead magnesium niobate-lead titanate ceramics,” Japanese Journal of Applied Physics, Part 1, vol. 34, no. 10, pp. 5658–5663, 1995.
28. Z. Kighelman, D. Damjanovic, and N. Setter, “Electromechanical properties and self-polarization in relaxor Pb$\left({\text{Mg}}_{1/3}{\text{Nb}}_{2/3}\right){\text{O}}_{3}$ thin films,” Journal of Applied Physics, vol. 89, no. 2, pp. 1393–1401, 2001.
29. V. S. Vikhnin, R. Blinc, and R. Pirc, “Mechanisms of electrostriction and giant piezoelectric effect in relaxor ferroelectrics,” Journal of Applied Physics, vol. 93, no. 12, pp. 9947–9952, 2003.
30. A. A. Bokov and Z. G. Ye, “Giant electrostriction and stretched exponential electromechanical relaxation in 0.65Pb$\left({\text{Mg}}_{1/3}{\text{Nb}}_{2/3}\right){\text{O}}_{3}$–0.35PbTiO3 crystals,” Journal of Applied Physics, vol. 91, no. 10, p. 6656, 2002.
31. H. Uršič, M. Škarabot, M. Hrovat et al., “The electrostrictive effect in ferroelectric 0.65Pb$\left({\text{Mg}}_{1/3}{\text{Nb}}_{2/3}\right){\text{O}}_{3}$–0.35PbTiO3 thick films,” Journal of Applied Physics, vol. 103, no. 12, Article ID 124101, 2008.
32. H. Uršič, M. Hrovat, J. Holc et al., “A large-displacement 65Pb$\left({\text{Mg}}_{1/3}{\text{Nb}}_{2/3}\right){\text{O}}_{3}$–35PbTiO3/Pt bimorph actuator prepared by screen printing,” Sensors and Actuators B, vol. 133, no. 2, pp. 699–704, 2008.
33. Z. Feng, T. He, H. Xu, H. Luo, and Z. Yin, “High electric-field-induced strain of Pb$\left({\text{Mg}}_{1/3}{\text{Nb}}_{2/3}\right){\text{O}}_{3}$–PbTiO3 crystals in multilayer actuators,” Solid State Communications, vol. 130, no. 8, pp. 557–562, 2004.
34. B. Ko, J. S. Jung, and S. Y. Lee, “Design of a slim-type optical pick-up actuator using PMN-PT bimorphs,” Smart Materials and Structures, vol. 15, no. 6, pp. 1912–1918, 2006.
35. A. A. Bokov, X. Long, and Z.-G. Ye, “Optically isotropic and monoclinic ferroelectric phases in Pb$\left({\text{Zr}}_{1-x}{\text{Ti}}_{x}\right){\text{O}}_{3}$ (PZT) single crystals near morphotropic phase boundary,” Physical Review B, vol. 81, no. 17, Article ID 172103, 2010.
36. M. Algueró, C. Alemany, L. Pardo, and M. Pham-Thi, “Piezoelectric resonances, linear coefficients and losses of morphotropic phase boundary Pb$\left({\text{Mg}}_{1/3}{\text{Nb}}_{2/3}\right){\text{O}}_{3}$–PbTiO3 ceramics,” Journal of the American Ceramic Society, vol. 88, no. 10, pp. 2780–2787, 2005.
37. K. C. Kim, Y. S. Kim, H. J. Kim, and S. H. Kim, “Finite element analysis of piezoelectric actuator with PMN-PT single crystals for nanopositioning,” Current Applied Physics, vol. 6, no. 6, pp. 1064–1067, 2006.
38. M. Kosec, J. Holc, D. Kuscer, and S. Drnovšek, “Pb$\left({\text{Mg}}_{1/3}{\text{Nb}}_{2/3}\right){\text{O}}_{3}$–PbTiO3 thick films from mechanochemically synthesized powder,” Journal of the European Ceramic Society, vol. 27, no. 13–15, pp. 3775–3778, 2007.
39. M. Kosec, H. Uršič, J. Holc, M. Hrovat, D. Kuščer, and B. Malič, “High-performance PMN-PT thick films,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 57, no. 10, pp. 2205–2212, 2010.
40. Z. Feng, X. Zhao, and H. Luo, “Electric field effects on the domain structures and the phase transitions of 0.62Pb$\left({\text{Mg}}_{1/3}{\text{Nb}}_{2/3}\right){\text{O}}_{3}$–0.38PbTiO3 single crystals with different orientations,” Journal of Physics: Condensed Matter, vol. 16, no. 21, pp. 3769–3778, 2004.
41. T. Y. Koo and S. W. Cheong, “Dielectric and piezoelectric enhancement due to 90° domain rotation in the tetragonal phase of Pb$\left({\text{Mg}}_{1/3}{\text{Nb}}_{2/3}\right){\text{O}}_{3}$–PbTiO3,” Applied Physics Letters, vol. 80, no. 22, p. 4205, 2002.
42. A. Sehirlioglu, D. A. Payne, and P. Han, “Effect of poling on dielectric anomalies at phase transitions for lead magnesium niobate-lead titanate crystals in the morphotropic phase boundary region,” Journal of Applied Physics, vol. 99, no. 6, Article ID 064101, 2006.
43. A. K. Singh and D. Pandey, “Evidence for MB and MC phases in the morphotropic phase boundary region of ($1-x$)[Pb$\left({\text{Mg}}_{1/3}{\text{Nb}}_{2/3}\right){\text{O}}_{3}$]–xPbTiO3: a rietveld study,” Physical Review B, vol. 67, no. 6, Article ID 064102, 2003.
44. R. Zhang, B. Jiang, and W. Cao, “Orientation dependence of piezoelectric properties of single domain 0.67Pb$1-x$)[Pb$\left({\text{Mg}}_{1/3}{\text{Nb}}_{2/3}\right){\text{O}}_{3}$–0.33PbTiO3 crystals,” Applied Physics Letters, vol. 82, no. 21, pp. 3737–3739, 2003.
45. Y. Guo, H. Luo, K. Chen, H. Xu, X. Zhang, and Z. Yin, “Effect of composition and poling field on the properties and ferroelectric phase-stability of Pb$1-x$)[Pb$\left({\text{Mg}}_{1/3}{\text{Nb}}_{2/3}\right){\text{O}}_{3}$–PbTiO3 crystals,” Journal of Applied Physics, vol. 92, no. 10, pp. 6134–6138, 2002.
46. J. Carreaud, P. Gemeiner, J. M. Kiat et al., “Size-driven relaxation and polar states in PbMg1/3Nb2/3O3-based system,” Physical Review B, vol. 72, no. 17, pp. 1–6, 2005.
47. M. Algueró, B. Jiménez, and L. Pardo, “Transition between the relaxor and ferroelectric states for ($1-x$)Pb$\left({\text{Mg}}_{1/3}{\text{Nb}}_{2/3}\right){\text{O}}_{3-x}$PbTiO3 with $x=0.2$ and 0.3 polycrystalline aggregates,” Applied Physics Letters, vol. 87, no. 8, Article ID 082910, 3 pages, 2005.
48. K. Lefki and G. J. M. Dormans, “Measurement of piezoelectric coefficients of ferroelectric thin films,” Journal of Applied Physics, vol. 76, no. 3, pp. 1764–1767, 1994.
49. Q. Wan, C. Chen, and Y. P. Shen, “Effects of stress and electric field on the electromechanical properties of Pb$1-x$)[Pb$\left({\text{Mg}}_{1/3}{\text{Nb}}_{2/3}\right){\text{O}}_{3}$–0.32PbTiO3 single crystals,” Journal of Applied Physics, vol. 98, no. 2, Article ID 024103, 5 pages, 2005.
50. H. Uršič, M. Hrovat, J. Holc et al., “Influence of the substrate on the phase composition and electrical properties of 0.65PMN-0.35PT thick films,” Journal of the European Ceramic Society, vol. 30, no. 10, pp. 2081–2092, 2010.
51. H. Uršič, M. S. Zarnik, J. Tellier, M. Hrovat, J. Holc, and M. Kosec, “The influence of thermal stresses on the phase composition of 0.65Pb$1-x$)[Pb$\left({\text{Mg}}_{1/3}{\text{Nb}}_{2/3}\right){\text{O}}_{3}$–0.35PbTiO3 thick films,” Journal of Applied Physics, vol. 109, no. 1, Article ID 014101, pp. 1–5, 2011.
52. H. Uršič, M. Hrovat, D. Belavič et al., “Microstructural and electrical characterisation of PZT thick films on LTCC substrates,” Journal of the European Ceramic Society, vol. 28, no. 9, pp. 1839–1844, 2008.
53. L. A. Ivan, M. Rakotondrabe, J. Agnus et al., “Comparative material study between PZT ceramic and newer crystalline PMN-PT and PZN-PT materials for composite bimorph actuators,” Reviews on Advanced Materials Science, vol. 24, no. 1-2, pp. 1–9, 2010.
54. Y. M. Cheong, J. W. Lee, K. Kim et al., “Pickup for small form factor optical drive with 2.3mm height actuator,” Japanese Journal of Applied Physics Part 1, vol. 44, no. 5, pp. 3356–3359, 2005.
55. S. C. Woody, S. T. Smith, X. Jiang, and P. W. Rehrig, “Performance of single-crystal Pb(Mg1/3Nb2/3)-32%PbTiO3 stacked actuators with application to adaptive structures,” Review of Scientific Instruments, vol. 76, no. 7, Article ID 075112, 2005.
56. A. Hall, M. Allahverdi, E. K. Akdogan, and A. Safari, “Piezoelectric/electrostrictive multimaterial PMN-PT monomorph actuators,” Journal of the European Ceramic Society, vol. 25, no. 12, pp. 2991–2997, 2005.
57. M. S. Zarnik, D. Belavic, and S. Macek, “Evaluation of the constitutive material parameters for the numerical modelling of structures with lead-zirconate-titanate thick films,” Sensors and Actuators A, vol. 136, no. 2, pp. 618–628, 2007.
58. H. Park and D. A. Horsley, “MEMS deformable mirrors for adaptive optics using single crystal PMN-PT,” in Proceedings of IEEE/LEOS International Conference on Optical MEMS and Nanophotonics (OPT MEMS '08), pp. 90–91, August 2008.
59. W. K. Wilkie, D. J. Inman, J. M. Lloyd, and J. W. High, “Anisotropic laminar piezocomposite actuator incorporating machined PMN-PT single-crystal fibers,” Journal of Intelligent Material Systems and Structures, vol. 17, no. 1, pp. 15–28, 2006.
60. P. Ngernchuklin, E. K. Akdoǧan, and A. Safari, “Piezoelectric-electrostrictive monolithic bi-layer composite flextensional actuator,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 56, no. 6, Article ID 5075095, pp. 1131–1138, 2009.