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International Journal of Microwave Science and Technology
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Special Issues
International Journal of Microwave Science and Technology
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2012
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Article
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Fig 1
/
Research Article
Copper-Metalized GaAs pHEMT with Cu/Ge Ohmic Contacts
Figure 1
Dependence of the specific contact resistance of Cu/Ge ohmic contacts to GaAs/AlGaAs/InGaAs versus the annealing temperature (
𝑡
=
3
 min).