Synthesis and Characterization of Pb(Zr, Ti)O-Pb(Nb, Zn)O Thin Film Cantilevers for Energy Harvesting Applications
Figure 5
(a) SEM picture showing a dense PZT-PZN film with large grain size using optimum conditions (20% excess Pd, fast ramp rate, and PT nucleation layer), (b) X-ray diffraction pattern of the PZT-PZN film on the cantilever stack, and (c) AFM image of the PZT-PZN thin film on the cantilever stack having a roughness of 12 nm, due to the poly-Si layer needed for wet-etch processing.
