Smart Materials Research

Research Article

Development and Application of One-Sided Piezoelectric Actuating Micropump

Table 1

Specification of each design.
Experiment
case no. 		Design of valveDesign of pump chamberDesign of fins
Thickness
(mm)		Length
(mm)		ShapeChamber size (mm3)Inlet/outlet
diameter (mm)		Thickness
(mm)		Height
(mm)		Number of fin
10.55O 498019.tab.001———
215O 498019.tab.001———
31.55O 498019.tab.001———
40.55N 498019.tab.001———
50.55NC 498019.tab.001———
60.55NC 498019.tab.001———
70.55OC 498019.tab.001———
80.25OC 498019.tab.001———
90.25NCW 498019.tab.001———
100.25NCW 498019.tab.00111.256
110.25NCW 498019.tab.00112.56
120.25NCW 498019.tab.0010.51.2512
130.23NCW 498019.tab.001———
140.23.5NCW 498019.tab.001———
O: original valve; N: narrow valve; C: valve with cone; W: with combined design of cold plate and pump chamber.