Research Article
Development and Application of One-Sided Piezoelectric Actuating Micropump
Table 2
The geometric dimension of pump design.
| |
Case no. | Design of primary chamber | Design of secondary chamber | Length
(mm) | Width
(mm) | Height
(mm) | Diaphragm thickness (mm) | Length
(mm) | Width
(mm) | Height
(mm) | Diaphragm thickness (mm) |
| | Basic | 45 | 28 | 4 | 0.5 | 7 | 20 | 4 | 0.5 | | 1 | 45 | 28 | 4 | 0.5 | 7 | 28 | 4 | 0.5 | | 2 | 45 | 28 | 4 | 0.5 | 7 | 12 | 4 | 0.5 | | 3 | 45 | 28 | 4 | 0.5 | 7 | 20 | 2 | 0.5 | | 4 | 43 | 28 | 4 | 0.5 | 7 | 20 | 4 | 0.5 | | 5 | 41 | 28 | 4 | 0.5 | 7 | 20 | 4 | 0.5 | | 6 | 45 | 28 | 3 | 0.5 | 7 | 20 | 4 | 0.5 | | 7 | 45 | 28 | 2 | 0.5 | 7 | 20 | 4 | 0.5 | | 8 | 45 | 28 | 1 | 0.5 | 7 | 20 | 4 | 0.5 | | 9 | 45 | 28 | 4 | 0.3 | 7 | 20 | 4 | 0.5 | | 10 | 45 | 28 | 4 | 0.7 | 7 | 20 | 4 | 0.5 |
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