Investigation of the Working Parameters of a Single Magnetron of a Multiple Ion Cluster Source: Determination of the Relative Influence of the Parameters on the Size and Density of Nanoparticles

<table>Scheme of the Multiple Ion Cluster Source (MICS) in the configuration for using a single magnetron (a). Photograph of the MICS connected to the NC200U-B model ion cluster source (b). Photograph of the three individual 1-inch diameter magnetrons (c).</table>

Dataset Papers in Science

fig1

Figure 1

Figure 1: Investigation of the Working Parameters of a Single Magnetron of a Multiple Ion Cluster Source: Determination of the Relative Influence of the Parameters on the Size and Density of Nanoparticles 

Figure 1 | Investigation of the Working Parameters of a Single Magnetron of a Multiple Ion Cluster Source: Determination of the Relative Influence of the Parameters on the Size and Density of Nanoparticles 