Hydrogenated Silicon Carbide Thin Films Prepared with High Deposition Rate by Hot Wire Chemical Vapor Deposition Method

<table>Low angle X-ray diffraction pattern of some SiC:H films deposited at different deposition pressures.</table>

Journal of Coatings

Figure 5: Hydrogenated Silicon Carbide Thin Films Prepared with High Deposition Rate by Hot Wire Chemical Vapor Deposition Method 