Journals
Publish with us
Publishing partnerships
About us
Blog
Advances in Acoustics and Vibration
Table of Contents
Special Issues
Advances in Acoustics and Vibration
/
2011
/
Article
/
Fig 5
/
Research Article
Dynamic Analysis of Electrostatic Microactuators Using the Differential Quadrature Method
Figure 5
Capacities of microelectrostatic actuator for various thicknesses.