Research Article
Electrical Properties of Amorphous Titanium Oxide Thin Films for Bolometric Application
Table 1
Experimental parameters of reactive sputtering and the results of measurements. (SCCM is an abbreviation of standard cubic centimeter per minute).
| | Samples | Ar (SCCM) | O2/(O2+ Ar) (pO2) | Thickness (nm) | O/Ti ratio | Resistivity ( cm) | Conductivity ( cm−1) | Activation energy (eV) | (%) |
| | S10 | 80 | 1.0% | 101 | 1.73 | 0.26 | 3.85 | 0.09 | 1.2 | | S25 | 80 | 2.5% | 100 | 1.84 | 1.9 | 0.53 | 0.15 | 1.9 | | S40 | 80 | 4.0% | 98 | 1.91 | 3.1 | 0.32 | 0.16 | 2.0 | | S55 | 80 | 5.5% | 99 | 1.97 | 10.1 | 0.01 | 0.18 | 2.3 |
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