High Conductivity of Mg-Doped Al_0.3Ga_0.7N with Al_0.4Ga_0.6N/AlN Superlattice Structure

Figure 2

3×3 μm² AFM image for as-grown sample A (a) with RMS of 0.352 nm, at 800°C-N₂-activated sample B (b) with RMS of 0.225 nm, 850°C-N₂-activated sample C (c) with RMS of 0.299 nm, and 900°C-N₂-activated sample D (d) with RMS of 2.21 nm for 5 min.

(a)

(b)

(c)

(d)