Advances in Condensed Matter Physics

Research Article

Application of Ellipsometry to Control the Plasmachemical Synthesis of Thin TiONx Layers

Table 4

Precise values of ellipsometric angles (for test).
()() (Ψ), deg
50171.431033.8416
55168.692730.8415
60164.816727.1589
65158.709622.5939
70147.096216.9903