Finite Conductivity Effects in Electrostatic Force Microscopy on Thin Dielectric Films: A Theoretical Model

Figure 3

(a) Vertical electrostatic force as a function of the screening length. (b) Vertical electrostatic force as a function of the thin film dielectric constant. Inset shows the values of the force for smaller dielectric constants. In both figures, the force has been calculated for  nm and  nm, and  nm,  nm, , and  V.

(a)

(b)