The Investigation of Field Plate Design in 500 V High Voltage NLDMOS

Table 1

Key reference sizes of this NLDMOS.

Item	Description	Size
PFP1	Polysilicon field plate, source side	7
PFP2	Polysilicon field plate, drain side	10
MFP1	Metal field plate, source side	22
MFP2	Metal field plate, middle	3
MFP3	Metal field plate, drain side	25
	MFP3 extending PFP2 (left side)	8