Research Article

Determination of Temperature-Dependent Stress State in Thin AlGaN Layer of AlGaN/GaN HEMT Heterostructures by Near-Resonant Raman Scattering

Figure 1

(a) UV Raman spectra of AlGaN/GaN heterostructure with varying temperature and (b) the local amplified graph of the A1(LO) mode of AlGaN.
(a)
(b)