Ni-Based Ohmic Contacts to n-Type 4H-SiC: The Formation Mechanism and Thermal Stability

Table 5

Electrical properties of Au/Ni₂Si/n-SiC and Au/Ta₃₅Si₁₅N₅₀/Ni₂Si/n-SiC ohmic contacts versus heat treatments.

Heat treatments	Au/Ni2Si/n-SiC		Au/Ta35Si15N50/Ni2Si/n-SiC
	(×10^−4 Ω cm^2)	(Ω/sq)	(×10^−4 Ω cm^2)	(Ω/sq)
As-deposited	~4	0.29	~4	0.29
800°C/Ar/3 min	~4.5	0.26	~4	0.22
400°C/air/150 h	Nonohmic	0.68	~4.5	0.17