DC Performance Variations of SOI FinFETs with Different Silicide Thickness

Figure 2

DC performance and variations of the SOI FinFETs with the of (a) 8 and (b) 10 nm at drain voltage () of 0.05 V and (c) 1.0 V. The number of measured devices is 50 for each .

(a)

(b)

(c)