DC Performance Variations of SOI FinFETs with Different Silicide Thickness

<div>Average and standard deviations of dc parameters for the SOI FinFETs with <svg height="12.2578pt" id="M116" style="vertical-align:-3.29568pt" version="1.1" viewbox="-0.0498162 -8.96212 18.6793 12.2578" width="18.6793pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M620 675H597C578 656 570 650 541 650H144C112 650 104 653 94 675H72C59 618 42 552 23 493L53 491C71 534 88 564 105 585C124 608 144 615 238 615H290L197 121C182 40 174 34 88 28L82 0H361L367 28C275 34 266 38 281 121L374 615H441C522 615 543 608 553 583C562 560 566 531 565 493L597 494C603 551 612 629 620 675Z" id="g113-85"></path></g><g transform="matrix(.0091,0,0,-0.0091,7.176,3.132)"><path d="M327 325C324 350 312 408 304 433C283 442 256 451 213 451C120 451 59 391 59 320C59 243 125 210 188 181C237 158 266 136 266 93C266 52 231 24 195 24C134 24 93 81 74 148L42 143C42 106 51 37 59 23C78 8 125 -12 177 -12C257 -12 345 35 345 127C345 198 292 234 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Advances in Condensed Matter Physics

fig4

Figure 4

Figure 4: DC Performance Variations of SOI FinFETs with Different Silicide Thickness 