Tunable Inductors Using Integrated Vanadium Dioxide Phase Change Thin Films

<div>Top views of fabricated tunable inductors structures with (a) single line coil inductor, (b) dual line coil inductor with two turns in the bottom coil, and (c) dual line coil inductor with four turns in the bottom coil. Yellow areas are gold. Black areas on the yellow wires are the VO<sub>2</sub> stubs. The dimension of VO<sub>2</sub> is 23.1 <i>μ</i>m × 26.3 <i>μ</i>m shown in (d). All units are in <i>μ</i>m.</div>

Advances in Condensed Matter Physics

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Figure 1

Figure 1: Tunable Inductors Using Integrated Vanadium Dioxide Phase Change Thin Films 