Tunable Inductors Using Integrated Vanadium Dioxide Phase Change Thin Films

<div>(a) Measurement results of resistivity versus temperature for a VO<sub>2</sub> thin film on sapphire substrate (logarithm scale). (b) Top view of VO<sub>2</sub> test structure. The dimension of VO<sub>2</sub> bar (shown in light blue) is 2 mm × 0.1 mm (length × width).</div>

Advances in Condensed Matter Physics

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Figure 2

Figure 2: Tunable Inductors Using Integrated Vanadium Dioxide Phase Change Thin Films 