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Advances in Condensed Matter Physics
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Advances in Condensed Matter Physics
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2018
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Article
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Fig 1
Research Article
Structural and Optical Properties of Amorphous Al
2
O
3
Thin Film Deposited by Atomic Layer Deposition
Figure 1
XRD patterns of Si (100) and all films of different cycles grown on Si (100) substrates.
(a)
(b)