Advances in Condensed Matter Physics / 2018 / Article / Fig 10

Research Article

Structural and Optical Properties of Amorphous Al2O3 Thin Film Deposited by Atomic Layer Deposition

Figure 10

(a) Refractive index (continued curves) and extinction coefficient (open symbols) spectra derived from the Al2O3 films with different thicknesses. (b) Absorption spectra of Al2O3 films with different thickness.