Advances in Condensed Matter Physics / 2018 / Article / Tab 2

Research Article

Structural and Optical Properties of Amorphous Al2O3 Thin Film Deposited by Atomic Layer Deposition

Table 2

Structural and electronic parameters extracted from SE analysis of the five different samples.

ALD cycle/eV/eV/nm/nm

1001.66118.24644.7074.333.0811.620.080.68
2001.39156.83393.5670.302.9919.630.250.67
3001.2272.6539.0725.232.9830.950.890.58
4000.59334.78430.6292.862.9239.050.150.53
5001.11207.70295.8659.762.9250.400.210.73