An Analytical Theory of Piezoresistive Effects in Hall Plates with Large Contacts

Figure 14

Sensitivity of output voltage versus mechanical stress (normalized to supply voltage ) for offset-free circular devices of Figure 13. All other components of the stress tensor vanish, as well as . The plot is a graphical representation of (26b), (28b), (28c), (18a)–(18i), and (19b) in the limit of small stress and with the piezoresistive coefficient for low p-doped silicon. Largest stress sensitivity of 48.3501%/GPa is obtained for aspect ratios which means and this is also the number of squares between supplies or sense contacts. The curve is mirror symmetric to .