An Analytical Theory of Piezoresistive Effects in Hall Plates with Large Contacts

Figure 2

(a) Rectangular device with large supply contacts and point-sized sense contacts with potential distribution and current streamlines at . At zero stress it has two squares input resistance and according to (4) this gives . (b) Cross-shaped device with large supply contacts and large sense contacts with potential distribution and current streamlines at . At zero stress it has 1.0359 squares input resistance and according to (4) this gives . The plots were obtained by a finite element simulation (FEM) with commercial software code COMSOL MULTIPHYSICS. This FEM simulation gives a stress output signal of device (a) which differs only 0.4 ppm from from [2]. An FEM calculation of device (b) gives an output signal that is 57% larger than .

(a)

(b)