Substrate Temperature-Dependent Structural, Optical, and Electrical Properties of Thermochromic VO₂(M) Nanostructured Films Grown by a One-Step Pulsed Laser Deposition Process on Smooth Quartz Substrates

Table 2

Optical properties of the PLD VO₂(M) films grown at different temperatures.

Substrate temperature (°C)	(%)		(%)		(%)
	RT	90°C	RT	90°C
450	38.4	37.2	55.7	43.0	12.7
550	40.1	38.9	59.1	45.1	14
650	41.1	40.1	61.2	46.5	14.7
750	44.6	43.0	68.3	49.4	18.9