Fuzzy TOPSIS for Multiresponse Quality Problems in Wafer Fabrication Processes

Table 5

Closeness coefficients for each combination of control factors.

Number	A	B	C	D	E	F	𝐶^∼𝑖	m(𝐶^∼𝑖)
1	1	1	1	1	1	1	(0.6972, 0.6987, 0.8673)	0.6987
2	1	2	2	2	2	2	(0.7466, 0.7481, 0.8905)	0.7481
3	1	3	3	3	3	3	(0.7517, 0.7413, 0.8896)	0.7413
4	2	1	1	2	2	3	(0.7446, 0.7465, 0.8923)	0.7465
5	2	2	2	3	3	1	(0.5647, 0.5258, 0.7600)	0.5258
6	2	3	3	1	1	2	(0.7280, 0.6673, 0.7075)	0.6673
7	3	1	2	1	3	3	(0.6993, 0.7242, 0.7854)	0.7242
8	3	2	3	2	1	1	(0.5241, 0.3691, 0.4239)	0.3691
9	3	3	1	3	2	2	(0.4140, 0.4063, 0.4063)	0.4063
10	1	1	3	3	2	1	(0.7213, 0.7227, 0.8798)	0.7227
11	1	2	1	1	3	2	(0.7099, 0.7112, 0.8739)	0.7112
12	1	3	2	2	1	3	(0.7478, 0.7334, 0.8600)	0.7334
13	2	1	2	3	1	2	(0.7893, 0.7839, 0.8958)	0.7839
14	2	2	3	1	2	3	(0.7707, 0.7682, 0.9035)	0.7682
15	2	3	1	2	3	1	(0.3764, 0.3999, 0.7198)	0.3999
16	3	1	3	2	3	2	(0.8629, 0.8629, 0.9449)	0.8629
17	3	2	1	3	1	3	(0.4501, 0.4581, 0.3428)	0.4581
18	3	3	2	1	2	1	(0.2495, 0.2479, 0.1063)	0.2479