Research Article

Fuzzy TOPSIS for Multiresponse Quality Problems in Wafer Fabrication Processes

Table 6

Averaged closeness value over each level of control factors.

LevelABCDEF

10.72590.75650.57010.63630.61840.4940
20.64860.59670.62720.64330.60660.6966
30.51140.53270.68860.60630.66090.6953

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