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Research Letters in Materials Science
Volume 2007, Article ID 95307, 5 pages
http://dx.doi.org/10.1155/2007/95307
Research Letter

Effect of Postdeposition Annealing on the Structural, Electrical, and Optical Properties of DC Magnetron Sputtered Ta2O5 Films

1Department of Physics, Sri Venkateswara University, Tirupati 517502, India
2Department of Instrumentation, Indian Institute of Science, Bangalore 560012, India

Received 12 August 2007; Accepted 5 November 2007

Academic Editor: Maria Antonietta Loi

Copyright © 2007 S. V. Jagadeesh Chandra et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

S. V. Jagadeesh Chandra, P. Sreedhara Reddy, G. Mohan Rao, and S. Uthanna, “Effect of Postdeposition Annealing on the Structural, Electrical, and Optical Properties of DC Magnetron Sputtered Films,” Research Letters in Materials Science, vol. 2007, Article ID 95307, 5 pages, 2007. https://doi.org/10.1155/2007/95307.