Fabrication of Si₃N₄ Nanocrystals and Nanowires Using PECVD

Figure 5

(a) A SEM image of single superlong Si₃N₄ nanowire growing on Fe catalyst coated Si substrate treated for 4 hours; (b) another Si₃N₄ nanowire taken in other place of the same sample.

(a)

(b)