High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with <i>In Situ</i> AFM

<table>Indium positive secondary ion image from BAM L200 (same data set as Figure <a href="../fig9/">9</a>). The unresolved indium features actually consist of two line pairs (each with 5 nm wide indium rich lines)—the distance between the line pairs is not documented.</table>

Advances in Materials Science and Engineering

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Figure 10

Figure 10: High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with <i>In Situ</i> AFM 

Figure 10 | High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with In Situ AFM 