High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with In Situ AFM
Figure 8
Effect of oxygen flow rate on SIMS signal for a cobalt alloy; the graph shows the Co+ secondary ion signal as oxygen was bled into the chamber through a needle valve. The plot has been normalised to the signal when the needle valve was closed (i.e., no oxygen flow, chamber pressure 6.9 × 10−6 mbar). 5 keV, 1270 pA Ga+ primary beam, 10 × 10 μm scan area. It can be seen from the gradient that there is likely a significant oxygen enhancement effect for cobalt secondary ions even at the lowest pressure (with no oxygen flow).
