Hydrogen Charging Effects in Pd/Ti/TiO<sub>2</sub>/Ti Thin Films Deposited on Si(111) Studied by Ion Beam Analysis Methods

<table>Charging time dependence of resistivity in titanium layer.</table>

Advances in Materials Science and Engineering

Figure 4: Hydrogen Charging Effects in Pd/Ti/TiO<sub>2</sub>/Ti Thin Films Deposited on Si(111) Studied by Ion Beam Analysis Methods 