Hydrogen Charging Effects in Pd/Ti/TiO<sub>2</sub>/Ti Thin Films Deposited on Si(111) Studied by Ion Beam Analysis Methods

<table>Comparison of H profiles for the sample Pd/Ti/TiO<sub>2</sub>/Ti/Si measured by SIMS (a) and N-15 (b).</table>

Advances in Materials Science and Engineering

Figure 6: Hydrogen Charging Effects in Pd/Ti/TiO<sub>2</sub>/Ti Thin Films Deposited on Si(111) Studied by Ion Beam Analysis Methods 