Hydrogen Charging Effects in Pd/Ti/TiO₂/Ti Thin Films Deposited on Si(111) Studied by Ion Beam Analysis Methods

Table 1

Thicknesses of the samples, nominal and obtained from RBS measurements.

	Pd/TiO2/Ti/Si(111)		Pd/Ti/TiO2/Ti/Si(111)
	Nominal thicknesses	RBS thicknesses	Nominal thicknesses	RBS thicknesses
Pd	20 nm	20 nm	20 nm	19 nm
Ti	—	—	50 nm	40 nm
TiO2	100 nm	97 nm	100 nm	96 nm
Ti	100 nm	79 nm	100 nm	80 nm