Advances in Materials Science and Engineering / 2012 / Article / Tab 1

Research Article

Isothermal and Two-Temperature Zone Selenization of Mo Layers

Table 1

Partial pressure (atm.) of different Se molecules in vapor phase of Se [7].

T, KT, °CPse, atm.Se2Se3Se5Se6Se7Se8

6503772.46 ×10−35.54 × 10−41.32 × 10−51.32 × 10−33.89 × 10−41.55 × 10−42.75 × 10−5
Partial pressure (%)10022.50.5453.6615.86.31.1
8005279.2 × 10−22.35 × 10−21.26 × 10−45.76 × 10−26.92 × 10−33.23 × 10−35.88 × 10−4
Partial pressure (%)10025.540.1462.617.523.510.64

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