Simulation and System Design of a 3D Metrology Optical System Based on a Bidirectional OLED Microdisplay

<table class="table-group" width="800px"><tr class="fig-image" id="a"><td><img alt="417376.fig.009a" src="https://static.hindawi.com/articles/amse/volume-2012/417376/figures/417376.fig.009a.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(a) </b>Measurement object simulated with ZEMAX.</td></tr></table></td></tr><tr class="fig-image" id="b"><td><img alt="417376.fig.009b" src="https://static.hindawi.com/articles/amse/volume-2012/417376/figures/417376.fig.009b.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(b) </b>Measurement object recalculated with IOF-3D-Software tool.</td></tr></table></td></tr></table>

<table>Simulated and reconstructed sinusoidal measuring object.</table>

Advances in Materials Science and Engineering

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Figure 9

Figure 9: Simulation and System Design of a 3D Metrology Optical System Based on a Bidirectional OLED Microdisplay 