Table 1: Raman spectroscopy data of Ag-DLC films with various amounts of silver.

Sample No.C2H2 flow rateDeposition rate (nm/min)Ag concentration (at.%)G band peak (cm−1)FWHM (cm−1)

12.1039.561.31578.6111.02.05
21.7515.332.51588.2115.02.26
32.8013.213.41584.0113.12.39
43.159.45.91566.3129.72.23
53.5013.44.51555.5144.91.83
63.5016.01.81557.0151.81.56
75.6021.601553.6153.61.59