Purity of Ion Beams: Analysis and Simulation of Mass Spectra and Mass Interferences in Ion Implantation

<table>Mass spectrum module 2 of ENCOTION. The simulated mass spectra from 0 to 200 u show peaks simulated by multiply charged and molecular ions of the elements B, O, F, Mo, and W. All peaks that are caused by ions containing Mo are plotted in blue.</table>

Advances in Materials Science and Engineering

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Figure 10

Figure 10: Purity of Ion Beams: Analysis and Simulation of Mass Spectra and Mass Interferences in Ion Implantation 